Influence of substrate temperature on N-doped ZnO films deposited by RF magnetron sputtering

Research output: Contribution to journal › Article › peer-review

Access to Document

@article{6d5564ae613842669736db65ef81ea34,

title = "Influence of substrate temperature on N-doped ZnO films deposited by RF magnetron sputtering",

author = "{DCM Group Author} and Fortunato, {Elvira Maria Correia} and Martins, {Rodrigo Ferr{\~a}o de Paiva}",

year = "2007",

month = jan,

day = "1",

doi = "10.1016/j.tsf2007.03.061",

language = "Unknown",

volume = "515",

pages = "8785--8788",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

number = "24",

}

TY - JOUR

T1 - Influence of substrate temperature on N-doped ZnO films deposited by RF magnetron sputtering

AU - DCM Group Author

AU - Fortunato, Elvira Maria Correia

AU - Martins, Rodrigo Ferrão de Paiva

PY - 2007/1/1

Y1 - 2007/1/1

U2 - 10.1016/j.tsf2007.03.061

DO - 10.1016/j.tsf2007.03.061

M3 - Article

VL - 515

SP - 8785

EP - 8788

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

IS - 24

ER -