Properties of a-Si : H TFTs using silicon carbonitride as dielectric

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)
Original languageEnglish
Pages (from-to)797-801
Number of pages5
JournalJournal of Non-Crystalline Solids
Volume338-40
Issue number1 SPEC. ISS.
DOIs
Publication statusPublished - 15 Jun 2004

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