Properties of ITO films deposited by r.f.-PERTE on unheated polymer substrates-dependence on oxygen partial pressure

Research output: Contribution to journalArticlepeer-review

43 Citations (Scopus)
Original languageEnglish
Pages (from-to)215-218
JournalThin Solid Films
Volume427
Issue number1-2
DOIs
Publication statusPublished - 3 Mar 2003

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